Product Blog

Where did the turbomolecular pump come from?

turbomolecular pump

In 1916, Gaede initiated the development of pumps incorporating various geometric shapes, which necessitated extremely narrow gaps between stationary and rotating components. This intricate design rendered the pumps highly susceptible to damage even from minuscule dust particles. So, how could this be improved? BTLAS, a manufacturer of vacuum pump air filters, shares the evolution of turbomolecular pumps.

In 1945, Dr. Willi Becker took a keen interest in researching various types of pumps. In his pursuit to improve oil diffusion pumps, he designed a rotating barrier with the aim of keeping oil molecules away from the container. This comprised a rotating impeller and a stationary stator equipped with axially reversed blades. Becker discovered that this configuration enabled substantial compression ratios at the molecular level. Consequently, a groundbreaking idea emerged: designing a pump consisting of multiple stages connected in series, where the oil would be solely utilized for bearing lubrication.

Turbomolecular pumps entered commercial production in 1958, boasting a pumping speed of 150 l/s and weighing 95 kg. Although initial annual production ranged from 100 to 200 units primarily used in universities and research institutions, their straightforward operation and pristine vacuum conditions paved the way for new applications in the analytical industry and industrial process technology. The rapid advancements in microelectronics and microchip technology, in particular, relied heavily on turbomolecular pumps, as they ensured the high vacuum levels required under extreme conditions.

For such high-vacuum pumps, eliminating dust and impurities is imperative. If used in combination, it is essential to install a vacuum pump air filter ahead of the primary pump to prevent contaminants in the intake gas from affecting system performance.

BTLAS, a dedicated manufacturer of vacuum pump air filters with over two decades of experience, addresses inlet filtration challenges in the vacuum realm. Currently, our integrated water and dust removal filters have demonstrated promising results. If your intake conditions involve contaminants, water, or other substances requiring filtration, please consult BTLAS. We will provide you with customized solutions tailored to your specific needs.

Leave a Reply